Yes, igus offers different e-chains, which can also be used in a cleanroom. Extensive tests were carried out with the energy chains for this purpose at the Fraunhofer Institute. A selection of qualified e-chains can be found here.
ISO Class 1: E3, E6.1, E6, e-skin
ISO Class 2: easychain, zipper, E2 mini*, E2.1*, E2/000 E4.1*, T3
ISO Class 3: 2400/2500
*) Only for certain sizes and radii 1) Only for size 1400/1500